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20μm interdigital gold electrode single crystal silicon-based capacitor array high-precision scientific research biosensor chip MEMS

20μm interdigital gold electrode single crystal silicon-based capacitor array high-precision scientific research biosensor chip MEMS

【Numbering】BK2021012609 【CAS】cas
【Item No.】BK2021012609 【specification】
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1. Dimensions: 4mm*7mm*0.52mm.


2. Line width: 30 u m, line spacing: 20 u m, finger length: 1.4mm, number of interdigital fingers: 26 (52 fingers).


3. The electrode substrate is single crystal silicon, and the surface of the silicon wafer grows Si02 with a thickness of 300nm;


4. Metal layer structure: Cr/Au, thickness is 10nm, 100nm respectively;


5. Electrode operating temperature range: -150℃~500℃;


6. Mainly used in various chemical, physical and biological sensors, with reliable performance and stable quality.


Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance

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Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance.The website pictures are from the Internet. The pictures are for reference only. Please take the real object as the standard. In case of infringement, please contact us to delete them immediately.
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